Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Abstract Low-temperature plasma-processing technologies are essential for material synthesis and device fabrication. Not only the utilization but also development of plasma-related products services requires an understanding multiscale hierarchies complex behaviors phenomena, including plasma generation in physics chemistry, transport energy mass through sheath region, morphology- geometry-dependent surface reactions. science technology play a pivotal role exploration new applications control methods. Presently, science-based data-driven approaches to systems progressing with state-of-the-art deep learning, machine artificial intelligence. In this review, researchers processing, review discuss requirements challenges research these fields. particular, prediction parameters discovery processing recipes asserted by outlining emerging science-based, approaches, which called informatics.